JPH0747790Y2 - 電子ビームテスタ - Google Patents

電子ビームテスタ

Info

Publication number
JPH0747790Y2
JPH0747790Y2 JP1989107836U JP10783689U JPH0747790Y2 JP H0747790 Y2 JPH0747790 Y2 JP H0747790Y2 JP 1989107836 U JP1989107836 U JP 1989107836U JP 10783689 U JP10783689 U JP 10783689U JP H0747790 Y2 JPH0747790 Y2 JP H0747790Y2
Authority
JP
Japan
Prior art keywords
sample
airtight
connector
electron beam
pin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989107836U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0346957U (en]
Inventor
誠 窪山
敏則 篠岡
裕博 若月
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP1989107836U priority Critical patent/JPH0747790Y2/ja
Publication of JPH0346957U publication Critical patent/JPH0346957U/ja
Application granted granted Critical
Publication of JPH0747790Y2 publication Critical patent/JPH0747790Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1989107836U 1989-09-14 1989-09-14 電子ビームテスタ Expired - Lifetime JPH0747790Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989107836U JPH0747790Y2 (ja) 1989-09-14 1989-09-14 電子ビームテスタ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989107836U JPH0747790Y2 (ja) 1989-09-14 1989-09-14 電子ビームテスタ

Publications (2)

Publication Number Publication Date
JPH0346957U JPH0346957U (en]) 1991-04-30
JPH0747790Y2 true JPH0747790Y2 (ja) 1995-11-01

Family

ID=31656506

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989107836U Expired - Lifetime JPH0747790Y2 (ja) 1989-09-14 1989-09-14 電子ビームテスタ

Country Status (1)

Country Link
JP (1) JPH0747790Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008059759A (ja) * 2006-08-29 2008-03-13 Horiba Ltd 真空装置及び真空装置に用いられる高電圧印加ユニット

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63152565U (en]) * 1987-03-25 1988-10-06
JPH0521884Y2 (en]) * 1987-12-10 1993-06-04

Also Published As

Publication number Publication date
JPH0346957U (en]) 1991-04-30

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